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Overview

MEMS  (MicroElectroMechanical Systems) are tiny mechanical devices which are built onto semiconductor chips and are measured in micrometers. They are used to produce pressure, temperature, chemical and vibration sensors, light reflectors and switches as well as accelerometers for airbags, vehicle control, pacemakers and games.

Due to its semiconductor background itemic's TARGOSS™ platform offers a wide range of independent applications to provide in-depth analyses of measurements, inspections and process data generated during MEMS production.