Overview
STATUS CONTROL | Status Monitoring
Equipment effectiveness can be evaluated by observing the status over time.
Representative indicators (e.g. per equipment) are derived by applying specific formulas. One option is to collect and evaluate the equipment status according to SEMI E10 standard. This requires the equipment interface SEMI E10 compliant or at least SEMI E10 compatible.
The MES combines automatic equipment feedback with manual status input by operators. If for instance the equipment cannot determine the cause of a stop, it can be manually added by choosing “lack of material”. The MES evaluates the status information and provides the SEMI E10 compliant analysis result reports. Level 5 status monitoring is possible, but may require a high level of operator interaction.
