Overview

CHANELL | Statistical Process Control

TARGOSS™ STATISTICAL PROCESS CONTROL identifies statistical abnormalities respectively the over- or undershooting of threshold values in data series. Employees in charge can be informed by e-mail. TARGOSS™ STATISTICAL PROCESS CONTROL provides handling advices for automatic or manual corrective actions and can request user comments.

Single parameter charts or groups of charts allow a good overview of single processes or whole process chains. Charts are available on-line or off-line.
TARGOSS™ STATISTICAL PROCESS CONTROL is characterised by a clear and simple structure and can handle a variety of different parameters with diverse context combinations.

TARGOSS™ STATISTICAL PROCESS CONTROL is able to check data and results for other TARGOSS applications. For example, there is the possibility to verify the results of the TARGOSS™ OVERLAY Analysis or the measurement data of TARGOSS™ CRITICAL DIMENSION to control defined process specifications. This creates a vital possibility to supervise process limits without safeguarding every single application.

  • Dynamic and virtual data channels
  • Control chart generation and visualization
  • Data pre-processing (raw data filtering and flyer reduction)
  • CP/CPK determination and tracking
  • Supports lean-6-sigma strategies
  • Large library of statistical / mathematical functionalities
  • Automated notification of limit violation
  • Manual and automated data tagging (data signature description and analysis)
  • Dynamic and static limits
  • Support of multi variant correlations
  • Multiple limit support
  • Web interface

 

Statistical Process Control (SPC)