Overview
DEWAVEE | Time Series Analysis
TARGOSS™ TIME SERIES ANALYSIS deconstructs series of data in single and traceable components. The data sets can be segmented into sub series. Special mathematical filters can extract more information from the sub series which can be used as the base for FDC.
Aberrations in a special segment of a time series can be reported immediately to detect yield relevant problems early enough.
In combination with TARGOSS™ VISUAL DATA MINING a special feature in a segment can be traced, which, as an example, may have an influence on a concrete yield problem.
- Storage of process time series
- Segmentation of time series
- Analysis and classification of segments
- Correlation of measurement data and inspection results
- Data visualization
- Applicable to all substrate processes
