Overview
QUERAA | Visual Data Mining
TARGOSS™ VISUAL DATA MINING allows to search a big amount of data for various criteria. The cause of any expected or unexpected event can quickly and easily be identified and analysed. TARGOSS™ VISUAL DATA MINING can handle up to 20 mio data sets and more than 3000 parameters and display them in various sights. An example: Noticeable variations of CD uniformity, low throughput of production equipment or problems with yield are easily detected and corrections can be quickly implemented. Methods like FDC, FMEA, 8D or DoE are ideally supported. TARGOSS™ VISUAL DATA MINING can also collect data from multiple production plants for comparison.
TARGOSS™ VISUAL DATA MINING can be combined with any TARGOSS™ application. An example: By using an adequate system configuration extremely critical recipe steps (PLASMA ETCH) in regard to the final CD-uniformity can be identified.
- 20 million datasets with up to 5000 parameters/dataset
- See and visualize your data in linked charts
- 2D/3D charts and graphs
- “Speak” with your data via click, drag and drop
- Query without writing scripts
- No pre-calculation
- Flexible diagnostics exploration
- Monitor for “Most significant changes”
- Data segmentation tree
- Relational or absolute results
- Event monitor
- Option for off-line data analysis
